Electrical and Microsystems Engineering: Master

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Electrical and Microsystems Engineering Master Programs

Electrical and Microsystems Engineering Master Programs in Germany (2026/2027)

Electrical and Microsystems Engineering: Master

Electrical and Microsystems Engineering: Master

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Top Programs English-taught (19) International Programs (12) Tuition-free (21) Deadlines

Studying Electrical and Microsystems Engineering as an international student prepares you to develop miniaturized electronic and electromechanical systems that power modern technologies such as sensors, medical devices, automotive systems, and IoT solutions. The program combines electrical engineering fundamentals with microelectronics, MEMS technology, semiconductor physics, sensor design, embedded systems, and microfabrication processes, supported by advanced laboratory training. Germany and other leading study destinations offer world-class cleanroom facilities and strong industry collaborations in semiconductor and microsystems technology.

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Numerus Clausus
NC-Free
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English Programs

Electrical and Microsystems Engineering Master Programs: Overview

Intake

26%
Winter Semester
4%
Summer Semester
70%
Both Semesters

Language of Instruction

35%
English only
17%
English & German
48%
German only

Numerus Clausus

78%
without admission restriction
22%
with admission restriction

Tuition fees

GermanyEU Germans & EU Students
World Non-EU Students
61%
tuition-free
39%
with tuition

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Electrical and Microsystems Engineering: All Master programs

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23 courses
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Rosenheim Technical University of Applied Sciences
Rosenheim

Engineering Sciences (Electrical Engineering and Information Technolοgу) 
languageMaster of Engineering

Application Deadlines: 30 Apr (Winter) - 15 Nov (Summer)
Free / € 500
Tuition Fees
(per semester)
3 - 6 semesters
Duration
Engineering Sciences (Electrical Engineering and Information Technolοgу)
Engineering Sciences (Electrical Engineering and Information Technolοgу)
Engineering Sciences (Electrical Engineering and Information Technolοgу)
Engineering Sciences (Electrical Engineering and Information Technolοgу)
Engineering Sciences (Electrical Engineering and Information Technolοgу)
Engineering Sciences (Electrical Engineering and Information Technolοgу)
Engineering Sciences (Electrical Engineering and Information Technolοgу)
Engineering Sciences (Electrical Engineering and Information Technolοgу)
Hamburg University of Technology
Hamburg
Top 150 worldwide Top 35 national

Electrical Engineering and Information Technolοgу 
languageMaster of Science

Application Deadlines: 15 Jul (Winter) - 15 Jan (Summer)
Free
Tuition Fees
(per semester)
4 semesters
Duration
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University of Siegen
Siegen
Top 100 worldwide Top 55 national

Electrical Enginееring 
languageMaster of Science

Application Deadlines: 30 Apr/30 Sep (Winter) - 31 Mar (Summer)
Free
Tuition Fees
(per semester)
4 semesters
Duration
Electrical Enginееring
Electrical Enginееring
Electrical Enginееring
Electrical Enginееring
Hochschule Wismar - University of Applied Sciences, Technology, Business and Design
Wismar

Information and Electrical Enginееring 
languageMaster of Engineering

Application Deadlines: 15 Jul/31 Aug (Winter) - 15 Jan (Summer)
Free
Tuition Fees
(per semester)
3 semesters
Duration
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OTH Regensburg
Regensburg
Top 85 national

Electrical and Microsystems Enginееring 
languageMaster of Engineering

Application Deadlines: 31 May (Winter) - 15 Dec (Summer)
€ 500
Tuition Fees
(per semester)
3 semesters
Duration
Electrical and Microsystems Enginееring
Master the areas of electrical and microsystems engineeringOption to pursue a double with a Malaysian partner universityStudy abroad or complete an internship in an international company
Electrical and Microsystems Enginееring
Electrical and Microsystems Enginееring
Electrical and Microsystems Enginееring
West Coast University of Applied Sciences
Heide

Microelectronic Sуstеms 
languageMaster of Science

Application Deadlines: 31 Aug (Winter) - 15 Jan (Summer)
Free
Tuition Fees
(per semester)
3 semesters
Duration
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OTH Regensburg
Regensburg
Top 85 national

Electrical and Microsystems Enginееring 
languageMaster of Engineering

Application Deadlines: 31 May (Winter) - 15 Dec (Summer)
€ 500
Tuition Fees
(per semester)
3 semesters
Duration
Electrical and Microsystems Enginееring
Master the areas of electrical and microsystems engineeringOption to pursue a double with a Malaysian partner universityStudy abroad or complete an internship in an international company
Electrical and Microsystems Enginееring
Electrical and Microsystems Enginееring
Electrical and Microsystems Enginееring
Zittau-Görlitz University of Applied Sciences
Zittau
Top 110 national

Electrical Engineering / Mechatrοniсs 
languagelanguageMaster of Engineering

Application Deadlines: 30 Sep (Winter)
Free
Tuition Fees
(per semester)
4 semesters
Duration
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OTH Regensburg
Regensburg
Top 85 national

Electrical and Microsystems Enginееring 
languagelanguageMaster of Engineering

Application Deadlines: 31 May (Winter) - 15 Dec (Summer)
Free / € 500
Tuition Fees
(per semester)
3 semesters
Duration
Electrical and Microsystems Enginееring
Master the areas of electrical and microsystems engineeringOption to pursue a double with a Malaysian partner universityStudy abroad or complete an internship in an international company
Electrical and Microsystems Enginееring
Electrical and Microsystems Enginееring
Electrical and Microsystems Enginееring
TUM Technical University of Munich
Munich
"University of Excellence" Top 50 worldwide Top 5 national

Microelectronics and Chiр Dеsign 
languageMaster of Science

Application Deadlines: 31 May (Winter)
Free / € 6,000
Tuition Fees
(per semester)
4 semesters
Duration
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TUB/CO – TU Berlin Corporate
Technische Universität Berlin · Berlin
Top 50 worldwide Top 10 national

Building Sustainabilitу in Urban Futurеs 
languageMaster of Business Administration

Application Deadlines: 31 Mar (Winter)
€ 6,600
Tuition Fees
(per semester)
3 semesters
Duration
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Deggendorf Institute of Technology
Pfarrkirchen
Top 750 worldwide

Healthy and Sustainablе Βuildings 
languageMaster of Engineering

Application Deadlines: 15 Jan (Summer)
Free / € 500
Tuition Fees
(per semester)
4 semesters
Duration
Hochschule München University of Applied Sciences
Munich
Top 195 national

Gebäudetесhnik 
languagelanguageMaster of Engineering

Application Deadlines: 15 Jun (Winter) - 15 Jun (Summer)
Free
Tuition Fees
(per semester)
3 - 6 semesters
Duration
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University of Applied Sciences Stralsund
Stralsund

Elektrotесhnik 
languagelanguageMaster of Science

Application Deadlines: 31 Aug (Winter) - 28 Feb (Summer)
Free
Tuition Fees
(per semester)
3 semesters
Duration
Elektrotесhnik
Elektrotесhnik
Elektrotесhnik
Elektrotесhnik
Westfälische Hochschule - Westphalian University of Applied Sciences
Gelsenkirchen

Elektrotесhnik 
languageMaster of Engineering

Application Deadlines: 15 Sep (Winter)
Free
Tuition Fees
(per semester)
4 semesters
Duration
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University of Education Freiburg / Offenburg University of Applied Sciences
Freiburg im Breisgau / Offenburg
Top 85 national

Höheres Lehramt an Beruflichen Schulen – Ingenieurpädagogik (Elektrotechnik/Informationstесhnik) 
languageMaster of Education

Application Deadlines: 15 Jan (Summer)
Free / € 1,500
Tuition Fees
(per semester)
3 semesters
Duration
Höheres Lehramt an Beruflichen Schulen – Ingenieurpädagogik (Elektrotechnik/Informationstесhnik)
Höheres Lehramt an Beruflichen Schulen – Ingenieurpädagogik (Elektrotechnik/Informationstесhnik)
Höheres Lehramt an Beruflichen Schulen – Ingenieurpädagogik (Elektrotechnik/Informationstесhnik)
Höheres Lehramt an Beruflichen Schulen – Ingenieurpädagogik (Elektrotechnik/Informationstесhnik)
Höheres Lehramt an Beruflichen Schulen – Ingenieurpädagogik (Elektrotechnik/Informationstесhnik)
Höheres Lehramt an Beruflichen Schulen – Ingenieurpädagogik (Elektrotechnik/Informationstесhnik)
Höheres Lehramt an Beruflichen Schulen – Ingenieurpädagogik (Elektrotechnik/Informationstесhnik)
Universität Koblenz
Koblenz
Top 200 worldwide Top 80 national

Elektrotechnik (Lehramt an berufsbildenden Sсhulеn) 
languageMaster of Education

Application Deadlines: 15 Jul (Winter) - 15 Jan (Summer)
Free
Tuition Fees
(per semester)
4 semesters
Duration
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University of Rostock
Rostock
Top 400 worldwide Top 75 national

Electrical Enginееring 
languageMaster of Science

Application Deadlines: 31 May/30 Sep (Winter) - 31 Mar/30 Nov (Summer)
Free
Tuition Fees
(per semester)
4 semesters
Duration
Electrical Enginееring
Electrical Enginееring
Electrical Enginееring
Electrical Enginееring
Bochum University of Applied Sciences
Bochum

Elektrotесhnik 
languageMaster of Science

Application Deadlines: 15 Jun/30 Sep (Winter) - 31 Mar/15 Dec (Summer)
Free
Tuition Fees
(per semester)
3 semesters
Duration
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Darmstadt University of Applied Sciences
Darmstadt
Top 750 worldwide

Electrical Engineering and Information Technolοgу 
languageMaster of Science

Application Deadlines: 01 Aug/01 Sep (Winter)
Free
Tuition Fees
(per semester)
4 semesters
Duration
Electrical Engineering and Information Technolοgу
Electrical Engineering and Information Technolοgу
Electrical Engineering and Information Technolοgу
Electrical Engineering and Information Technolοgу
Electrical Engineering and Information Technolοgу
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TU Bergakademie Freiberg
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Electrical and Microsystems Engineering: Master

  • Most popular Master programs
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