University of Freiburg

Microsystems Engineering

M.Sc. (Master of Science)
Subjects: Electrical Engineering, Bioengineering, Mechatronics, Systems Engineering, Nanosciences
English only
Winter semester:  31 May/15 Jul
Application Deadlines
2 Years (starting: Winter semester)
Free / 1500€
Tuition fees (per semester)
Winter semester
Mode of admission:
without admission restriction
directly at University
Study mode:
On campus

Course description

Producing tiny micro components that can only be seen through a microscope seems like science fiction to you? It’s not! And during the M.Sc. in Microsystems Engineering, you’ll learn how such systems can be found and used in almost every modern area, such as the automobile, energy, or medical industry. During the program, you’ll use state-of-the-art equipment and will be prepared for a successful career in almost every economic sector.


Qualification Requirements

Previous Degree

Bachelor's degree in mechatronics, electrical, electronics, or mechanical engineering, or in a closely related study field, previous knowledge in mathematics, chemistry, physics, electronics, electrical and mechanical engineering and materials.

Language Requirements

The following certificates are recognised as proof of your language proficience.

CERF English
min C1
min 7
min 94
min C2 Proficiency (CPE)
min C1 Advanced (CAE)
Does the university recognize "other equivalent language certificates"? yes

Additional information:
Only native speakers from the USA, the UK, Australia, New Zealand and Canada are exempted from submitting an English test score. A confirmation that the medium of instruction at your university was English is not sufficient.

Application & Admission

Application Deadlines

Applications are open from:
Winter semester:April 01 (German)April 01 (EU)April 01 (Non EU)
Summer semester:

Application Procedure & Selection

Mode of admission:
without admission restriction
Admission test/interview:
directly at University
Application Fee:

Application Documents

Applications will be done electronically. Please register in the online application portal, enter your data and upload the following documents:

  1. A certified copy of your undergraduate diploma (bachelors or equivalent) or the original document.
  2. A certified copy of your undergraduate transcript of records or the original document, showing all courses and credits taken and all grades/marks obtained as well as the final/current overall average grade.
  3. A certified copy of your English proficiency test result or the original document.
  4. recommendation letter issued by a university professor, using the form indicated by the university.
  5. statement of purpose.
  6. Your Curriculum Vitae or résumé.
  7. APS certificate (only for applicants who have studied in China, Mongolia or Vietnam).

Additional documents that can be useful to submit:

  • GRE score (all 3 sections are important),
  • certificate about your class rank
  • certificate about the average grade of your class,
  • University entrance exam result from your home country (if applicable),
  • GATE result (India).

Further Information

For more information please check the

Course Website