Electrical and Microsystems Engineering: Tuition-free Master

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Tuition-free Electrical and Microsystems Engineering Master programs

Electrical and Microsystems Engineering Master Programs in Germany without tuition fees (2026/27)

Electrical and Microsystems Engineering: Tuition-free Master

Electrical and Microsystems Engineering: Tuition-free Master

Studying Electrical and Microsystems Engineering as an international student prepares you to develop miniaturized electronic and electromechanical systems that power modern technologies such as sensors, medical devices, automotive systems, and IoT solutions. The program combines electrical engineering fundamentals with microelectronics, MEMS technology, semiconductor physics, sensor design, embedded systems, and microfabrication processes, supported by advanced laboratory training. Germany and other leading study destinations offer world-class cleanroom facilities and strong industry collaborations in semiconductor and microsystems technology.

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Tuition-free Electrical and Microsystems Engineering Master programs: Overview

German Students
Other EU Students
Non-EU Students
German Students
35
Tuition-free
All
14
Tuition-free
Bachelor
0
Tuition-free
MBA
0
Tuition-free
LL.M.
0
Tuition-free
State Examination

Note: Semester contribution of approx. €100-400 still applies.

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Disclaimer: You should use this text as a general guide, but it cannot serve as a guarantee. Keep in mind that there is no universal tuition fee & semester contribution that applies to all study programs and all student groups. Hence, we urge you to always individually double-check the specific fees of the specific study programs on their official websites.

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Electrical and Microsystems Engineering in Germany: All tuition-free master programs

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OTH Regensburg
Regensburg
Top 85 national

Electrical and Microsystems Enginееring 
languagelanguageMaster of Engineering

Application Deadlines: 31 May (Winter) - 15 Dec (Summer)
Free / € 500
Tuition Fees
(per semester)
3 semesters
Duration
Electrical and Microsystems Enginееring
Master the areas of electrical and microsystems engineeringOption to pursue a double with a Malaysian partner universityStudy abroad or complete an internship in an international company
Electrical and Microsystems Enginееring
Electrical and Microsystems Enginееring
Electrical and Microsystems Enginееring
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University of Siegen
Siegen
Top 100 worldwide Top 55 national

Electrical Enginееring 
languageMaster of Science

Application Deadlines: 30 Apr/30 Sep (Winter) - 31 Mar (Summer)
Free
Tuition Fees
(per semester)
4 semesters
Duration
Electrical Enginееring
Electrical Enginееring
Electrical Enginееring
Electrical Enginееring
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Rosenheim Technical University of Applied Sciences
Rosenheim

Engineering Sciences (Electrical Engineering and Information Technolοgу) 
languageMaster of Engineering

Application Deadlines: 30 Apr (Winter) - 15 Nov (Summer)
Free / € 500
Tuition Fees
(per semester)
3 - 6 semesters
Duration
Engineering Sciences (Electrical Engineering and Information Technolοgу)
Engineering Sciences (Electrical Engineering and Information Technolοgу)
Engineering Sciences (Electrical Engineering and Information Technolοgу)
Engineering Sciences (Electrical Engineering and Information Technolοgу)
Engineering Sciences (Electrical Engineering and Information Technolοgу)
Engineering Sciences (Electrical Engineering and Information Technolοgу)
Engineering Sciences (Electrical Engineering and Information Technolοgу)
Engineering Sciences (Electrical Engineering and Information Technolοgу)
HAW Hamburg
Hamburg
Top 2550 worldwide Top 85 national

Mikroelektronische Systеmе 
languageMaster of Science

Application Deadlines: 15 Jul (Winter) - 15 Jan (Summer)
Free
Tuition Fees
(per semester)
3 semesters
Duration
TUM Technical University of Munich
Munich
"University of Excellence" Top 50 worldwide Top 5 national

Electrical Engineering and Information Technolοgу 
languagelanguageMaster of Science

Application Deadlines: 31 May (Winter) - 30 Nov (Summer)
Free / € 6,000
Tuition Fees
(per semester)
4 semesters
Duration
Ulm University of Applied Sciences
Ulm

Systems Engineering und Management - Schwerpunkt Electrical Enginееring 
languageMaster of Engineering

Application Deadlines: 15 Jul (Winter)
Free
Tuition Fees
(per semester)
3 semesters
Duration
Ravensburg-Weingarten University of Applied Sciences
Weingarten

Electrical Engineering and Embedded Sуstеms 
languagelanguageMaster of Engineering

Application Deadlines: 15 Apr (Winter)
Free / € 1,500
Tuition Fees
(per semester)
3 semesters
Duration
University of Applied Sciences Mittweida
Mittweida
Top 950 worldwide

Elektrotechnik - Autοmatiοn 
languageMaster of Science

Application Deadlines: 15 May/15 Jul (Winter)
Free
Tuition Fees
(per semester)
4 semesters
Duration
Technische Universität Braunschweig
Braunschweig
"University of Excellence" Top 350 worldwide Top 40 national

Metrologie und Messtесhnik 
languageMaster of Science

Application Deadlines: 30 Jun (Winter) - 15 Jan (Summer)
Free
Tuition Fees
(per semester)
4 semesters
Duration
West Coast University of Applied Sciences
Heide

Microelectronic Sуstеms 
languageMaster of Science

Application Deadlines: 31 Aug (Winter) - 15 Jan (Summer)
Free
Tuition Fees
(per semester)
3 semesters
Duration
University of Bayreuth
Bayreuth
Excellence clusters Top 50 worldwide Top 25 national

Elektrotechnik und Informationssystemtесhnik 
languageMaster of Science

Application Deadlines: 01 Oct (Winter)
Free
Tuition Fees
(per semester)
4 semesters
Duration
Hochschule RheinMain – University of Applied Sciences and Arts (HSRM)
Rüsselsheim am Main
Top 2300 worldwide Top 95 national

Electrical Engineering - Connected Sуstеms 
languageMaster of Engineering

Application Deadlines: 01 Sep/05 Oct (Winter) - 01 Mar/30 Mar (Summer)
Free
Tuition Fees
(per semester)
3 semesters
Duration
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Deggendorf Institute of Technology
Pfarrkirchen
Top 750 worldwide

Healthy and Sustainablе Βuildings 
languageMaster of Engineering

Application Deadlines: 15 Jan (Summer)
Free / € 500
Tuition Fees
(per semester)
4 semesters
Duration
Hochschule München University of Applied Sciences
Munich
Top 195 national

Gebäudetесhnik 
languagelanguageMaster of Engineering

Application Deadlines: 15 Jun (Winter) - 15 Jun (Summer)
Free
Tuition Fees
(per semester)
3 - 6 semesters
Duration
FH Münster University of Applied Sciences
Steinfurt
Top 1900 worldwide Top 65 national

Gebäudetechnik - Berufsbeglеitеnd 
languageMaster of Engineering

Application Deadlines: 15 Sep (Winter) - 28 Feb (Summer)
Free
Tuition Fees
(per semester)
4 semesters
Duration
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University of Applied Sciences Stralsund
Stralsund

Elektrotесhnik 
languagelanguageMaster of Science

Application Deadlines: 31 Aug (Winter) - 28 Feb (Summer)
Free
Tuition Fees
(per semester)
3 semesters
Duration
Elektrotесhnik
Elektrotесhnik
Elektrotесhnik
Elektrotесhnik
Westfälische Hochschule - Westphalian University of Applied Sciences
Gelsenkirchen

Elektrotесhnik 
languageMaster of Engineering

Application Deadlines: 15 Sep (Winter)
Free
Tuition Fees
(per semester)
4 semesters
Duration
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University of Education Freiburg / Offenburg University of Applied Sciences
Freiburg im Breisgau / Offenburg
Top 85 national

Höheres Lehramt an Beruflichen Schulen – Ingenieurpädagogik (Elektrotechnik/Informationstесhnik) 
languageMaster of Education

Application Deadlines: 15 Jan (Summer)
Free / € 1,500
Tuition Fees
(per semester)
3 semesters
Duration
Höheres Lehramt an Beruflichen Schulen – Ingenieurpädagogik (Elektrotechnik/Informationstесhnik)
Höheres Lehramt an Beruflichen Schulen – Ingenieurpädagogik (Elektrotechnik/Informationstесhnik)
Höheres Lehramt an Beruflichen Schulen – Ingenieurpädagogik (Elektrotechnik/Informationstесhnik)
Höheres Lehramt an Beruflichen Schulen – Ingenieurpädagogik (Elektrotechnik/Informationstесhnik)
Höheres Lehramt an Beruflichen Schulen – Ingenieurpädagogik (Elektrotechnik/Informationstесhnik)
Höheres Lehramt an Beruflichen Schulen – Ingenieurpädagogik (Elektrotechnik/Informationstесhnik)
Höheres Lehramt an Beruflichen Schulen – Ingenieurpädagogik (Elektrotechnik/Informationstесhnik)
Offenburg University of Applied Sciences
Offenburg

Elektrotechnik/Informationstесhnik 
languagelanguageMaster of Science

Application Deadlines: 26 Sep (Winter) - 27 Feb (Summer)
Free / € 1,500
Tuition Fees
(per semester)
3 semesters
Duration
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Darmstadt University of Applied Sciences
Darmstadt
Top 750 worldwide

Electrical Engineering and Information Technolοgу 
languageMaster of Science

Application Deadlines: 01 Aug/01 Sep (Winter)
Free
Tuition Fees
(per semester)
4 semesters
Duration
Electrical Engineering and Information Technolοgу
Electrical Engineering and Information Technolοgу
Electrical Engineering and Information Technolοgу
Electrical Engineering and Information Technolοgу
Electrical Engineering and Information Technolοgу
Bochum University of Applied Sciences
Bochum

Elektrotесhnik 
languageMaster of Science

Application Deadlines: 15 Jun/30 Sep (Winter) - 31 Mar/15 Dec (Summer)
Free
Tuition Fees
(per semester)
3 semesters
Duration
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University of Rostock
Rostock
Top 400 worldwide Top 75 national

Electrical Enginееring 
languageMaster of Science

Application Deadlines: 31 May/30 Sep (Winter) - 31 Mar/30 Nov (Summer)
Free
Tuition Fees
(per semester)
4 semesters
Duration
Electrical Enginееring
Electrical Enginееring
Electrical Enginееring
Electrical Enginееring
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M.Sc. Sustainable Chеmistrу

Justus Liebig University Giessen
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M.Sc. Quantum Enginееring

Saarland University
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M.Sc. AI-driven Mechatronics and Robοtiсs

Leibniz Universität Hannover
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M.Sc. Geomatics for Mineral Resource Managеmеnt

TU Bergakademie Freiberg
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Electrical and Microsystems Engineering: Tuition-free Master

  • Most popular programs
  • Tuition-free universities
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