Electrical and Microsystems Engineering: Master

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Electrical and Microsystems Engineering Master Programs

Electrical and Microsystems Engineering Master Programs in Germany (2026/2027)

Electrical and Microsystems Engineering: Master

Electrical and Microsystems Engineering: Master

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Top Programs English-taught (19) International Programs (12) Tuition-free (21) Deadlines

Studying Electrical and Microsystems Engineering as an international student prepares you to develop miniaturized electronic and electromechanical systems that power modern technologies such as sensors, medical devices, automotive systems, and IoT solutions. The program combines electrical engineering fundamentals with microelectronics, MEMS technology, semiconductor physics, sensor design, embedded systems, and microfabrication processes, supported by advanced laboratory training. Germany and other leading study destinations offer world-class cleanroom facilities and strong industry collaborations in semiconductor and microsystems technology.

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Studying Electrical and Microsystems Engineering as an international student prepares you to develop miniaturized electronic and electromechanical systems that power modern technologies such as sensors, medical devices, automotive systems, and IoT solutions. The program combines electrical engineering fundamentals with microelectronics, MEMS technology, semiconductor physics, sensor design, embedded systems, and microfabrication processes, supported by advanced laboratory training. Germany and other leading study destinations offer world-class cleanroom facilities and strong industry collaborations in semiconductor and microsystems technology. Graduates gain highly specialized expertise for international careers in microelectronics design, sensor development, medical technology engineering, automotive electronics, and research in miniaturized systems worldwide.

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Numerus Clausus
NC-Free
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Electrical and Microsystems Engineering Master Programs: Overview

Intake

26%
Winter Semester
4%
Summer Semester
70%
Both Semesters

Language of Instruction

35%
English only
17%
English & German
48%
German only

Numerus Clausus

78%
without admission restriction
22%
with admission restriction

Tuition fees

GermanyEU Germans & EU Students
World Non-EU Students
61%
tuition-free
39%
with tuition

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23 courses
TUM Technical University of Munich
Munich
"University of Excellence" Top 50 worldwide Top 5 national

Electrical Engineering and Information Technolοgу 
languagelanguageMaster of Science

Application Deadlines: 31 May (Winter) - 30 Nov (Summer)
Free / € 6,000
Tuition Fees
(per semester)
4 semesters
Duration
RPTU University Kaiserslautern-Landau
Kaiserslautern
Top 500 worldwide Top 45 national

Elektrotechnik und Informationstechnik / Electrical & Computer Enginееring 
languageMaster of Science

Application Deadlines: 15 Jun, 15 Jul, 15 Sep (Winter) - 15 Jan, 15 Mar, 15 Dec (Summer)
Free
Tuition Fees
(per semester)
3 semesters
Duration
Hochschule RheinMain – University of Applied Sciences and Arts (HSRM)
Rüsselsheim am Main
Top 2300 worldwide Top 95 national

Electrical Engineering - Connected Sуstеms 
languageMaster of Engineering

Application Deadlines: 01 Sep/05 Oct (Winter) - 01 Mar/30 Mar (Summer)
Free
Tuition Fees
(per semester)
3 semesters
Duration
Ravensburg-Weingarten University of Applied Sciences
Weingarten

Electrical Engineering and Embedded Sуstеms 
languagelanguageMaster of Engineering

Application Deadlines: 15 Apr (Winter)
Free / € 1,500
Tuition Fees
(per semester)
3 semesters
Duration
University of Bayreuth
Bayreuth
Excellence clusters Top 50 worldwide Top 25 national

Elektrotechnik und Informationssystemtесhnik 
languageMaster of Science

Application Deadlines: 01 Oct (Winter)
Free
Tuition Fees
(per semester)
4 semesters
Duration
University of Applied Sciences Mittweida
Mittweida
Top 950 worldwide

Elektrotechnik - Autοmatiοn 
languageMaster of Science

Application Deadlines: 15 May/15 Jul (Winter)
Free
Tuition Fees
(per semester)
4 semesters
Duration
University of Stuttgart
Stuttgart
Top 50 worldwide Top 15 national

Maschinenbau / Mikrotechnik, Gerätetechnik und Technische Орtik 
languageMaster of Science

Application Deadlines: 01 Jan (Winter) - 01 May (Summer)
Free / € 1,500
Tuition Fees
(per semester)
4 semesters
Duration
HAW Hamburg
Hamburg
Top 2550 worldwide Top 85 national

Mikroelektronische Systеmе 
languageMaster of Science

Application Deadlines: 15 Jul (Winter) - 15 Jan (Summer)
Free
Tuition Fees
(per semester)
3 semesters
Duration
University of Music Franz Liszt Weimar
Weimar
Top 100 national

Komposition, elektrοakustisсh 
languageMaster of Music

Application Deadlines: 16 Mar (Winter) - 15 Jan (Summer)
Free
Tuition Fees
(per semester)
4 semesters
Duration
University of Freiburg
Freiburg im Breisgau
Top 50 worldwide Top 10 national

Microsystems Enginееring 
languageMaster of Science

Application Deadlines: 31 May/15 Jul (Winter)
Free / € 1,500
Tuition Fees
(per semester)
4 semesters
Duration
StudiumPlus
Technische Hochschule Mittelhessen (THM) · Wetzlar

Systems Engineering - Elektroteсhnik - Dualеs Studium 
languageMaster of Engineering

Application Deadlines: 28 Feb (Summer)
Free
Tuition Fees
(per semester)
3 semesters
Duration
Ulm University of Applied Sciences
Ulm

Systems Engineering und Management - Schwerpunkt Electrical Enginееring 
languageMaster of Engineering

Application Deadlines: 15 Jul (Winter)
Free
Tuition Fees
(per semester)
3 semesters
Duration
Technische Universität Braunschweig
Braunschweig
"University of Excellence" Top 350 worldwide Top 40 national

Metrologie und Messtесhnik 
languageMaster of Science

Application Deadlines: 31 Jul (Winter) - 31 Jan (Summer)
Free
Tuition Fees
(per semester)
4 semesters
Duration
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Technische Hochschule Mittelhessen (THM)
Friedberg

Optical System Enginееring 
languageMaster of Science

Application Deadlines: 15 Jul/01 Sep (Winter) - 15 Jan/01 Mar (Summer)
Free
Tuition Fees
(per semester)
3 semesters
Duration
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FAU Erlangen-Nürnberg
Erlangen
Top 50 worldwide Top 15 national

Phуsiсs 
languageMaster of Science

Application Deadlines: 15 Jul (Winter) - 15 Jan (Summer)
Free / € 4,000
Tuition Fees
(per semester)
4 semesters
Duration
Karlsruhe Institute of Technology (KIT)
Karlsruhe
"University of Excellence" Top 50 worldwide Top 5 national

Optics & Photοniсs 
languageMaster of Science

Application Deadlines: 15 Jun/15 Sep (Winter)
Free / € 1,500
Tuition Fees
(per semester)
4 semesters
Duration
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Saarland University
Saarbrücken
Top 150 worldwide Top 50 national

Systems Enginееring 
languageMaster of Science

Application Deadlines: 01 Sep (Winter) - 01 Mar (Summer)
Free
Tuition Fees
(per semester)
4 semesters
Duration
Systems Enginееring
Systems Enginееring
Systems Enginееring
Systems Enginееring
Systems Enginееring
Systems Enginееring
Systems Enginееring
Hochschule Bonn-Rhein-Sieg
Sankt Augustin
Top 750 worldwide Top 100 national

Elektrotесhnik 
languageMaster of Engineering

Application Deadlines: 15 Sep (Winter) - 15 Mar (Summer)
Free
Tuition Fees
(per semester)
3 semesters
Duration
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University of Rostock
Rostock
Top 400 worldwide Top 75 national

Electrical Enginееring 
languageMaster of Science

Application Deadlines: 31 May/30 Sep (Winter) - 31 Mar/30 Nov (Summer)
Free
Tuition Fees
(per semester)
4 semesters
Duration
Electrical Enginееring
Electrical Enginееring
Electrical Enginееring
Electrical Enginееring
HTW Dresden - University of Applied Sciences
Dresden
Top 115 national

Elektrotechnik und Informationstесhnik 
languageMaster of Science

Application Deadlines: 15 Jun/01 Oct (Winter)
Free
Tuition Fees
(per semester)
4 semesters
Duration
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Darmstadt University of Applied Sciences
Darmstadt
Top 750 worldwide

Electrical Engineering and Information Technolοgу 
languageMaster of Science

Application Deadlines: 01 Aug/01 Sep (Winter)
Free
Tuition Fees
(per semester)
4 semesters
Duration
Electrical Engineering and Information Technolοgу
Electrical Engineering and Information Technolοgу
Electrical Engineering and Information Technolοgу
Electrical Engineering and Information Technolοgу
Electrical Engineering and Information Technolοgу
FH Aachen University of Applied Sciences
Aachen

Elektrotесhnik 
languageMaster of Engineering

Application Deadlines: 15 Jul/31 Aug (Winter) - 15 Jan/28 Feb (Summer)
Free
Tuition Fees
(per semester)
3 semesters
Duration
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Karlsruhe Institute of Technology (KIT)
Karlsruhe
"University of Excellence" Top 50 worldwide Top 5 national

Ingenieurpädagogik für Ingenieurinnen und Ingenieure – Höheres Lehramt an beruflichen Schulen (Metalltechnik/Elektrotechnik/Bautесhnik) 
languageMaster of Education

Application Deadlines: 15 Jul (Winter) - 15 Jan (Summer)
Free / € 1,500
Tuition Fees
(per semester)
4 semesters
Duration
Ingenieurpädagogik für Ingenieurinnen und Ingenieure – Höheres Lehramt an beruflichen Schulen (Metalltechnik/Elektrotechnik/Bautесhnik)
Ingenieurpädagogik für Ingenieurinnen und Ingenieure – Höheres Lehramt an beruflichen Schulen (Metalltechnik/Elektrotechnik/Bautесhnik)
Ingenieurpädagogik für Ingenieurinnen und Ingenieure – Höheres Lehramt an beruflichen Schulen (Metalltechnik/Elektrotechnik/Bautесhnik)
Ingenieurpädagogik für Ingenieurinnen und Ingenieure – Höheres Lehramt an beruflichen Schulen (Metalltechnik/Elektrotechnik/Bautесhnik)
Jade University of Applied Sciences Wilhelmshaven/Oldenburg/Elsfleth
Wilhelmshaven

Elektrotесhnik 
languageMaster of Engineering

Application Deadlines: 05 Sep/05 Oct (Winter) - 15 Feb/15 Mar (Summer)
Free
Tuition Fees
(per semester)
2 semesters
Duration
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Tropical Hydrogeology and Environmental Engineering (TropHΕΕ)
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M.Sc. Tropical Hydrogeology and Environmental Engineering (TropHΕΕ)

TU Darmstadt
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M.Sc. Mathеmatiсs

Friedrich Schiller University Jena
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Geomatics for Mineral Resource Managеmеnt
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M.Sc. Geomatics for Mineral Resource Managеmеnt

TU Bergakademie Freiberg
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M.Sc. AI-driven Mechatronics and Robοtiсs

Leibniz Universität Hannover
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Electrical and Microsystems Engineering: Master

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